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November 17, 2002

DCC STUDENTS PERFORM HANDS ON WORKSHOP IN SUNY ALBANY’S RESEARCH FACILITY

On November 17, 2002, the students in Dr. William Ma’s ELT 211 course, a course in semiconductor process technology, were able to gain hands-on experience with the technology they had been discussing in the course.  Students were brought through the full process in the 200mm research facility located on SUNY Albany’s campus.  Preparation for the workshop included two guest appearances by SUNY Albany faculty to speak with the students about the processes and the analytical tools they would be working on during their visit to Albany.  Their workshop activities included lithography masking and patterning, oxide etching, metal deposition, and wafer inspection using both a scanning electron microscope (SEM) and focused ion beam (FIB).  Students were very impressed with the workshop and indicated in evaluations that the hands-on activities were tremendously useful and helpful in their understanding of the semiconductor industry.

 

Thanks are due to the following faculty and staff at the Univeristy of Albany:  Dr, James Castracane, Dr. Eric Eisenbraum, Dr. Di Wu, Dr. Eric Lifshin, Dr. Kathleen Dunn, Dr. Natalya Tokranova, Dr. Bai Xu, Dr. Kaushik Kumar, and the graduate assistants who helped out during the workshop.  A special thanks go to Ms. Jacqueline DiStefano, Director of Operations at the School of Nanosciences and Engineering, for coordinating the training exercise.  The instructor for the course, Dr. William Ma, and his lab assistant, Mr. Paul Melzer, have done a fabulous job in making this course accessible to our community college students and developing relevant hands-on experiences to facilitate the students’ learning.  Last but not least, thanks also go to Dr. Leah Akins, Department Head of the Engineering, Architecture, and Computer Technologies Department at DCC, for her support as well as for driving the DCC van (in the snow) to Albany and back for the Saturday workshop.

You can click on the thumbnails to view a larger picture and its caption.

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Gowning up

 

Gowned and ready to go

 

Wafer inspection

 

Wafer Slicing

 

Operating the spectrometer

 

DCC workshop participants

 

300mm fab under construction in background

 

 

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