TCP News Flash
November 17,
2002
DCC STUDENTS PERFORM HANDS ON WORKSHOP IN SUNY
ALBANY’S RESEARCH FACILITY
On November 17, 2002, the students in Dr.
William Ma’s ELT 211 course, a course in semiconductor
process technology, were able to gain hands-on experience
with the technology they had been discussing in the course.
Students were brought through the full process in the 200mm
research facility located on SUNY Albany’s campus.
Preparation for the workshop included two guest appearances
by SUNY Albany faculty to speak with the students about the
processes and the analytical tools they would be working on
during their visit to Albany. Their workshop activities
included lithography masking and patterning, oxide etching,
metal deposition, and wafer inspection using both a scanning
electron microscope (SEM) and focused ion beam (FIB).
Students were very impressed with the workshop and indicated
in evaluations that the hands-on activities were
tremendously useful and helpful in their understanding of
the semiconductor industry.
Thanks are due to the following faculty and
staff at the Univeristy of Albany: Dr, James Castracane,
Dr. Eric Eisenbraum, Dr. Di Wu, Dr. Eric Lifshin, Dr.
Kathleen Dunn, Dr. Natalya Tokranova, Dr. Bai Xu, Dr.
Kaushik Kumar, and the graduate assistants who helped out
during the workshop. A special thanks go to Ms. Jacqueline
DiStefano, Director of Operations at the School of
Nanosciences and Engineering, for coordinating the training
exercise. The instructor for the course, Dr. William Ma,
and his lab assistant, Mr. Paul Melzer, have done a fabulous
job in making this course accessible to our community
college students and developing relevant hands-on
experiences to facilitate the students’ learning. Last but
not least, thanks also go to Dr. Leah Akins, Department Head
of the Engineering, Architecture, and Computer Technologies
Department at DCC, for her support as well as for driving
the DCC van (in the snow) to Albany and back for the
Saturday workshop.
You can click
on the thumbnails to view a larger picture and its
caption.
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